SurePower® Series 13.56 MHz RF Plasma Generators

The SurePower® platform of RF plasma generators is the most advanced class of 13.56 MHz generators commercially available. SurePower® architecture incorporates state-of-the-art RF topologies, patented intrinsic power amplifier protection, improved design margins, and embedded V-I sensor to achieve superior reliability, reproducibility, and accuracy. All SurePower® models run on 208VAC mains. Some models are available to run on 400/480 VAC mains.

Performance of SurePower plasma generators can be enhanced with the addition of the newly released and patented Dynamic Frequency Tuning option. DFT is a significant enhancement over traditional AFT which uses guided search algorithms. Conventional frequency tuning schemes require more than 500 µsec of course and fine steps to search for the minima in reflected power. With DFT, measurement of power distortion is used to quickly and accurately adjust frequency

achieving minima in reflected power in less than 50µsec

Features & Benefits:

- Dynamic Frequency Tuning reduces plasma stabilization time and maintains minimum reflected power.
- Forward power accuracy of <±1.0% of set point
- Common Exciter - CEX enables frequency synchronization.

- Full functional front panel eases use for process development.

- Arc detection folds power back to minimize damage caused by arcs.

Applications:

SurePower® RF power generators are designed for all 13.56MHz applications including: PECVD, 

HDPCVD, PVD, ALD, etch, and strip for the manufacture of integrated circuits, photovoltaic devices, flat panel displays, and optical media. SurePower generators assure repeatable results wafer to wafer and lot to lot.
All MKS Instruments' RF Generators are NRTL certified and CE marked.

Mismatched Power Output
Worst phase forward power referenced to rating