ACG, DOFBC2-083, DPG-10, GHW-25A, NOVA-50A, OB1-R03, OB-GEN2, OB-GEN27, OEM-12B3, OEM-28B, OEM-50N, OEM-2000,  QL3513, QL6513, QL15013, QUANTA-10D, SPECTRUM 11002,  EDGE 400KHZ, RPG-100A, GHW-50A, OEM-12A, DPGD-10, OB2-GEN2

ADTEC RF PLASMA GENERATOR

AXG-600III

ADTEC RF Plasma Generator AX-2000 II AX-3000-27M

MKS Microwave System

 

 

 

 

 

 

 

 

 

 

 

 

 

 

Magnetron FI20162-1(PSK) FI20162-3(LAM), Magnetron Head SXRHC, Microwave Power  AX2115, Smart Match FI20045,Smart Match FI20606, Smart Power FI20160-1(PSK) FI20160-3(LAM),

Match Network 

MW-0113C, MW-0212ICP2, MWJ-1013,MWH-100

AE 維修實例

 

 

 

 

 

 

MDX-L HALO, MDX-L12M-650, LF-5, RF5S, RF20M, RFX600A

RPS 維修實例

3L AX7640, AX7670, FI20620, FI80131, FI80132

DC Power 

GEXUS-15R-02U

Custom Heater Tempcout

PHS-1040-NF-B,RGB-100-2A

SR-RACK-200mm

                

 

RPS測試平台

 

 

Microwave AX2115、AX2110測試平台 

 

Microwave Smart power、Smart match測試平台

 

0113C, MW-0212ICP2, MWJ-1013