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The SmartMatch module is an advanced microwave matching unit which utilizes phasemagnitude detection hardware and an advanced predictive tuning algorithm to provide fast,
reliable and repeatable matching. Available for power levels up to 6 kW, with user selectable
operating modes and reflected power threshold, the SmartMatch module has been qualified
to provide fast, reliable tuning with multiple plasma loads including O2, N2, CF4, NF3, H2O,NH3, N2H2 (and many others). Typical matching speed is below 1 second.
The SmartMatch module is compact and self-contained, with the micro-controller located
in the tuning head. This eliminates the need for a separate CPU and allows for completely
automatic, hands-off operation—ideal for multi-step processes while greatly reducing
development time.
The SmartMatch matching unit is available in standard or custom waveguide configurations
to best meet the specific size requirements. For flexibility, and upon customer request, a
separate local interface module may be used for program presets and manual tuning
operation.
Features & Benefits
• Fast, reliable matching, even for difficult plasma loads
• Hands-off operation with no separate controller needed for increased accuracy and lower CoO
•Advanced predictive algorithm complete with powerful micro-controller and fast stub moving mechanism ensures immediate plasma ignition, rapid matching and higher throughput
