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SmartPower® AX2500 Series intelligent microwave power generators are built on proven
experience in designing rugged, reliable microwave power generators for demanding
semiconductor fabrication and industrial applications. The compact AX2500 design
architecture incorporates field-proven technology, and combines new design features aimed
at improved performance and lower cost of ownership.
The SmartPower AX2500 Series consists of two models that cover a spectrum of
continuous microwave power from 180 W to 3 kW. Model AX2518 has maximum
performance of 1.8 kW and 3 kW for the AX2530. Frequency output is 2.455 GHz ±15 MHz.
Features & Benefits:
•Available in 1.8 and 3 kW power levels for 200 and 300mm applications
•Microprocessor-controlled filament cutback extends magnetron tube lifetime. Field-eplaceable magnetron tubes lower overall CoO
•Accurate power measurement and feedback ensures high repeatability
•Compact, modular design enhances cross-platform compatibility
