ASTRONex AX7685 Remote Plasma Source
(rated to 6.0 slm NF₃ flow) 

ASTRONe reactive gas generators are high output, self-contained reactive species sources for chamber cleaning applications. The ASTRONe reactive gas generators use patented Low-Field-Toroidal plasma technology to efficiently dissociate input gas to produce downstream reactive chemistries. Relative to other chamber clean technologies, the ASTRONe reactive gas generators are more efficient, have lower cost of ownership and effectively dissociate multiple source gases.